ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,497,288, issued on Dec. 16, was assigned to TEXAS INSTRUMENTS Inc. (Dallas).
"System and method for array of MEMS elements" was invented by Sean Christopher O'Brien (University Park, Texas), Kelly Jay Taylor (Allen, Texas), John Wesley Hamlin III (Dallas) and Christopher Murray Beard (Allen, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "In an example, a method of manufacturing a MEMS device includes forming a via. The method also includes depositing metal in the via and depositing a first layer of a non-photoactive organic polymer on the metal. The method includes baking the first layer of the non-photoactive organic polymer. The method also incl...