ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,381,532, issued on Aug. 5, was assigned to Texas Instruments Inc. (Dallas).
"Bulk acoustic wave device with integrated temperature sensor and heater" was invented by Keegan Shaun Martin (Dallas) and Ting-Ta Yen (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An acoustic-wave device includes a first electrode located over a substrate. A piezoelectric film is located over the first electrode and at least partially overlaps the first electrode. A second electrode is located over the piezoelectric film and at least partially overlaps the first electrode and the piezoelectric film. A temperature sensor is located in a same layer level as the ...