ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,020, issued on Oct. 7, was assigned to TES Co. LTD (Yongin-si, South Korea).
"Substrate processing apparatus" was invented by Jin-Hyung Kim (Yongin-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus for detecting tilting or offset of a tray supporting a substrate when a processing process such as a drying process for a substrate using supercritical fluid."
The patent was filed on July 9, 2024, under Application No. 18/767,916.
*For further information, including images, charts and tables, please visit: http://pa...