US Patent Issued to TEL MANUFACTURING AND ENGINEERING OF AMERICA on June 17 for "Substrate scanning apparatus with pendulum and rotatable substrate holder" (Minnesota, Massachusetts Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,348, issued on June 17, was assigned to TEL MANUFACTURING AND ENGINEERING OF AMERICA INC. (Chaska, Minn.).

"Substrate scanning apparatus with pendulum and rotatable substrate holder" was invented by Kevin Siefering (Excelsior, Minn.), Michael Gruenhagen (Norwood Young America, Minn.) and Matthew Gwinn (Winchendon, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of scanning a substrate includes immobilizing a substrate on a substrate holder within a processing chamber and performing a pass of a parallel raster pattern by synchronously driving a first rotary drive and a second rotary drive to move the substrate relative to a processing a...