ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,522,497, issued on Jan. 13, was assigned to Technische Universitiit Wien (Vienna).
"Micro-electromechanical system" was invented by Daniel Platz (Vienna), Ulrich Schmid (Vienna) and Jonas Hafner (Vienna).
According to the abstract* released by the U.S. Patent & Trademark Office: "A micro-electromechanical system (1) comprising: a sensor device (2), with a measuring deformer (3) exhibiting an effective temperature T1; a high-frequency resonator (4) that is mechanically coupled to the sensor device (2) and can interact with the measuring deformer (3); an energy converter (7) that is operatively connected to the high-frequency resonator (4) and is configured to excite the high-frequency...