US Patent Issued to TECHNISCHE UNIVERSITAT DORTMUND on Jan. 27 for "Photoacoustic gas sensor, and method for producing same" (German Inventor)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,535,406, issued on Jan. 27, was assigned to TECHNISCHE UNIVERSITAT DORTMUND (Dortmund, Germany).

"Photoacoustic gas sensor, and method for producing same" was invented by Stefan Palzer (Dortmund, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for producing a photoacoustic gas sensor for a target gas, having the steps of a) providing a wafer made of silicon, having a front face and a rear face. The wafer having a buried insulating layer within the silicon. The method including b) providing a suspended thermal emitter having a first cavity on the rear face of the wafer. The method including c) providing a sound-sensitive element on the fr...