US Patent Issued to TECHNETICS GROUP on July 15 for "Deposition processing systems having active temperature control and associated methods" (California Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,359,306, issued on July 15, was assigned to TECHNETICS GROUP LLC (Charlotte, N.C.).

"Deposition processing systems having active temperature control and associated methods" was invented by Angus McFadden (Santa Clara, Calif.) and Jason Wright (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Several embodiments of the present technology are directed to actively controlling a temperature of a substrate in a chamber during manufacturing of a material or thin film. In some embodiments, the method can include cooling or heating the substrate to have a temperature within a target range, depositing a material over a surface of the substrate,...