US Patent Issued to Taiwan Semiconductor Manufacturing on Sept. 9 for "EFEM robot auto teaching methodology" (Taiwanese Inventors)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,412,760, issued on Sept. 9, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"EFEM robot auto teaching methodology" was invented by Chien-Fa Lee (Hsinchu, Taiwan), Hsu-Shui Liu (Pingjhen, Taiwan), Jiun-Rong Pai (Jhubei, Taiwan) and Shou-Wen Kuo (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to a method of programming an EFEM. The method includes placing an automatic teaching element within an EFEM chamber at a first time. The automatic teaching element is operated at a second time to measure one or more parameters corresponding to an initial position of an EFEM robot within t...