US Patent Issued to Taiwan Semiconductor Manufacturing on Sept. 23 for "Semiconductor processing tool and methods of operation" (Taiwanese Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,422,755, issued on Sept. 23, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Semiconductor processing tool and methods of operation" was invented by Tai-Yu Chen (Hsinchu, Taiwan), Shang-Chieh Chien (New Taipei, Taiwan), Sheng-Kang Yu (Hsinchu, Taiwan), Li-Jui Chen (Hsinchu, Taiwan) and Heng-Hsin Liu (New Taipei, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Example implementations described herein include a laser source and associated methods of operation that can balance or reduce uneven beam profile problem and even improve plasma heating efficiency to enhance conversion efficiency and intensity for extreme ult...