US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on Sept. 16 for "Sub-resolution assist features" (California Inventors)

ALEXANDRIA, Va., Sept. 17 -- United States Patent no. 12,416,857, issued on Sept. 16, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING Co. LTD. (Hsinchu, Taiwan).

"Sub-resolution assist features" was invented by Kenji Yamazoe (San Jose, Calif.), Junjiang Lei (Fremont, Calif.) and Danping Peng (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods of semiconductor device fabrication are provided. In an embodiment, a method of semiconductor device fabrication includes receiving a first mask design comprising a first mask function, determining a transmission cross coefficient (TCC) of an exposure tool, decomposing the TCC into a plurality orders of eigenvalues and a plurality orders of eigenf...