ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,023, issued on Oct. 7, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).
"Rounded vertical wafer vessel rods" was invented by Ching-Wen Cheng (Zhubei, Taiwan), Xin-Kai Huang (Hsinchu, Taiwan) and Kuei-Hsiung Cho (Xinpu Township, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "In an embodiment, a system includes: a base; and a rod set comprising multiple rods connected to the base, wherein each rod of the rod set comprises multiple fingers disposed in a vertically-stacked relationship to each other and separated respectively from each other by respective slots, wherein each slot is configured to receive a bevel of a ...