ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,018, issued on Oct. 7, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING Co. LTD. (Hsinchu, Taiwan).
"Method of supplying chemical liquid" was invented by Yu-Cheng Chang (Miaoli County, Taiwan), Keng-Hui Pan (Tainan, Taiwan), Chieh-Jan Huang (Hsinchu, Taiwan), Ming-Lee Lee (Kaohsiung, Taiwan) and Chiang-Jeh Chen (Hsinchu, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes moving a drum containing a chemical liquid into a chamber of a chemical liquid supplying system. The drum is connected with a testing pipe. The chemical liquid is pumped from the drum to the testing pipe. A condition of the chemical liquid flowing through the t...