US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on Oct. 7 for "Apparatus and method of manufacturing a semiconductor device" (Taiwanese Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,437,975, issued on Oct. 7, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Apparatus and method of manufacturing a semiconductor device" was invented by Tsung-Cheng Wu (Hsinchu, Taiwan), Ming-Hsien Lin (Taichung, Taiwan), Chun-Fu Chen (Hsinchu, Taiwan) and Sheng-Ying Wu (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "To reduce the occurrence of current alarms in a semiconductor etching or deposition process, a controller determines an offset in relative positions of a cover ring and a shield over a wafer within a vacuum chamber. The controller provides a position alarm and/or adjusts the position of the...