US Patent Issued to Taiwan Semiconductor Manufacturing on Oct. 14 for "Micro-electromechanical systems (MEMS) device with outgas layer" (Taiwanese Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,441,604, issued on Oct. 14, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Micro-electromechanical systems (MEMS) device with outgas layer" was invented by Fan Hu (Taipei, Taiwan), Wen-Chuan Tai (Hsinchu, Taiwan), Li-Chun Peng (Hsin-Chu, Taiwan), Hsiang-Fu Chen (Zhubei, Taiwan), Ching-Kai Shen (Zhubei, Taiwan), Hung-Wei Liang (New Taipei, Taiwan) and Jung-Kuo Tu (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to an integrated chip including a semiconductor device substrate and a plurality of semiconductor devices arranged along the semiconductor device substrate. A micro-ele...