US Patent Issued to Taiwan Semiconductor Manufacturing on Nov. 4 for "Optical assembly with coating and methods of use" (Taiwanese Inventors)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,461,447, issued on Nov. 4, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Optical assembly with coating and methods of use" was invented by Wei-Hao Lee (Hsinchu, Taiwan), Pei-Cheng Hsu (Hsinchu, Taiwan), Huan-Ling Lee (Hsinchu, Taiwan), Ta-Cheng Lien (Hsinchu, Taiwan), Hsin-Chang Lee (Hsinchu, Taiwan) and Chin-Hsiang Lin (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Coated nanotubes and bundles of nanotubes are formed into membranes useful in optical assemblies in EUV photolithography systems. These optical assemblies are useful in methods for patterning materials on a semiconductor substrate. Such metho...