US Patent Issued to Taiwan Semiconductor Manufacturing on Nov. 25 for "Systems and methods for inspection stations" (Taiwanese Inventors)

ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,482,682, issued on Nov. 25, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Systems and methods for inspection stations" was invented by Yan-Hong Liu (Zhudong Township, Hsinchu County, Taiwan), Chien-Chih Wu (Hsinchu, Taiwan) and Che-Fu Chen (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A workstation includes: a processing chamber configured to process a workpiece; a load port configured to interface with an environment external to the workstation; a robotic arm configured to transfer the workpiece between the load port and the processing chamber; and a defect sensor configured to detect a defect along a...