US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on Nov. 18 for "Apparatus for cleaning semiconductor equipment" (Taiwanese Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,472,538, issued on Nov. 18, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Apparatus for cleaning semiconductor equipment" was invented by Shih-Kuo Liu (Nantou County, Taiwan), Chia-Hsun Chang (Changhua County, Taiwan), Keith Kuang-Kuo Koai (Hsinchu County, Taiwan), Wai Hong Cheah (Taichung, Taiwan) and Ming-Chuan Hung (Changhua County, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus includes a casing configured to be detachably mounted on a workpiece. The casing includes a first opening configured to expose a portion of the workpiece; a first support member coupled to the casing and constructed to...