ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,471,329, issued on Nov. 11, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).
"Semiconductor structures and manufacturing method thereof" was invented by Shih-Jung Tu (Tainan, Taiwan), Po-Wei Liu (Tainan, Taiwan), Tsung-Yu Yang (Tainan, Taiwan), Yun-Chi Wu (Tainan, Taiwan) and Chien Hung Liu (Hsinchu County, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor structure includes a substrate with a first surface and a second surface opposite to the first surface, a first and a second shallow trench isolations disposed in the substrate and on the second surface, a deep trench isolation structure in the sub...