US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on May 27 for "System for a semiconductor fabrication facility and method for operating the same" (Taiwanese Inventors)

ALEXANDRIA, Va., June 17 -- United States Patent no. 12,315,751, issued on May 27, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"System for a semiconductor fabrication facility and method for operating the same" was invented by Fu-Hsien Li (Taichung, Taiwan), Chi-Feng Tung (Miaoli County, Taiwan) and Hsiang Yin Shen (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An automatic cleaning unit for AMHS includes a plurality of sensors disposed on OHT rails. The sensors are configured to define a cleaning zone and to detect a location of an OHT vehicle. The automatic cleaning unit further includes a vacuum generator and a top cleaning part installed over the OH...