ALEXANDRIA, Va., June 17 -- United States Patent no. 12,311,498, issued on May 27, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).
"Monolithic platen" was invented by Tsung-Lung Lai (Hsinchu, Taiwan), Cheng-Ping Chen (Taichung, Taiwan), Shih-Chung Chen (Hsinchu, Taiwan) and Sheng-Tai Peng (Hsinchu, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "In an embodiment, a chemical mechanical planarization (CMP) system includes: a monolithic platen within a platen housing, wherein the monolithic platen is formed of a single piece of material, wherein the monolithic platen includes: a first portion within a first opening, and a second portion within a second opening, wherein the f...