US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on May 27 for "Automatic time delay and integration (TDI) mask inspection system calibration" (Taiwanese Inventors)

ALEXANDRIA, Va., June 17 -- United States Patent no. 12,316,828, issued on May 27, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Automatic time delay and integration (TDI) mask inspection system calibration" was invented by Pei-Yu Zhu (Hsinchu, Taiwan), Yen-Hsun Chen (Taipei, Taiwan) and Shang-Chieh Chien (New Taipei, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A mask inspection system employs TDI imaging. The mask inspection system is calibrated by iteratively repeating, until a stopping criterion is met: (i) simultaneously acquiring first and second TDI images using respective first and second TDI image sensors of the mask inspection system, the first and sec...