US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on May 13 for "Droplet generator and method of servicing extreme ultraviolet imaging tool" (Taiwanese Inventors)

ALEXANDRIA, Va., June 12 -- United States Patent no. 12,302,484, issued on May 13, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Droplet generator and method of servicing extreme ultraviolet imaging tool" was invented by Wei-Chih Lai (Changhua County, Taiwan), Han-Lung Chang (Kaohsiung, Taiwan), Bo-Tsun Liu (Taipei, Taiwan), Li-Jui Chen (Hsinchu, Taiwan) and Po-Chung Cheng (Chiayi County, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A droplet generator for an extreme ultraviolet imaging tool includes a reservoir for a molten metal, and a nozzle having a first end connected to the reservoir and a second opposing end where molten metal droplets emerge from the noz...