US Patent Issued to Taiwan Semiconductor Manufacturing on March 25 for "Semiconductor waveguides and methods of forming the same" (Taiwanese Inventors)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,259,576, issued on March 25, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Semiconductor waveguides and methods of forming the same" was invented by Yuan-Sheng Huang (Taichung, Taiwan) and Shih-Chang Liu (Kaohsiung County, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Depositing a side slab structure on a cladding layer before etching a supporting dielectric prevents tapering of a silicon waveguide during etching of the supporting dielectric and a substrate. For example, the side slab structure may be deposited over the silicon waveguide and the cladding layer after etching the cladding layer. As a result, when...