US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on March 25 for "Semiconductor manufacturing system, behavior recognition device and semiconductor manufacturing method" (Taiwanese Inventors)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,259,709, issued on March 25, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Semiconductor manufacturing system, behavior recognition device and semiconductor manufacturing method" was invented by Kai-Ting Yang (Taichung, Taiwan), Li-Jen Ko (Hsinchu County, Taiwan) and Hsiang Yin Shen (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A behavior recognition device for recognizing behaviors of a semiconductor manufacturing apparatus includes a storage device and a control unit. The storage device is configured to store log data of the semiconductor manufacturing apparatus. The control unit is cooperativel...