US Patent Issued to Taiwan Semiconductor Manufacturing on June 17 for "Apparatus and method for inspecting wafer carriers" (Taiwanese Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,373, issued on June 17, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Apparatus and method for inspecting wafer carriers" was invented by Cheng-Kang Hu (Kaohsiung, Taiwan), Shou-Wen Kuo (Hsinchu, Taiwan), Sheng-Hsiang Chuang (Hsin-Chu, Taiwan), Jiun-Rong Pai (Jhubei, Taiwan) and Hsu-Shui Liu (Pingjhen, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for inspecting wafer carriers is disclosed. In one example, the apparatus includes: a housing; a load port; a robot arm inside the housing; and a processor. The load port is configured to load a wafer carrier into the housing. The robot arm is configur...