US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on July 8 for "Reticle of protecting from particle attacks" (Taiwanese Inventors)

ALEXANDRIA, Va., July 9 -- United States Patent no. 12,353,143, issued on July 8, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Reticle of protecting from particle attacks" was invented by Yao-Tang Lin (Hsinchu, Taiwan), Tzu-Wen Chen (Hsinchu, Taiwan), Jian-Yuan Su (Hsinchu, Taiwan) and Ming-Hsin Chen (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A reticle includes a border section surrounding a pattern section, and gas openings arranged in and passing through the border section. The gas openings are coupled to a gas supply. Each gas opening extends in a first direction inclined to and forming an angle with a reticle center axis that extends perpendicul...