ALEXANDRIA, Va., July 30 -- United States Patent no. 12,370,648, issued on July 29, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).
"Surface clean system and method" was invented by Pei-Yi Su (Taichung, Taiwan) and Cheng-Chieh Chen (Tainan, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A portable handheld cleaning device is provided capable of cleaning the surface of the substrate table without damaging the surface. The portable handheld cleaning device in accordance with the present disclosure includes a base having a first side and a second side (the first side and the second side overlapping each other), a hollow structure on the first side of the base, and a weight ...