US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on July 29 for "Particulate matter filtration apparatus and method thereof" (Taiwanese Inventors)

ALEXANDRIA, Va., July 30 -- United States Patent no. 12,370,487, issued on July 29, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Particulate matter filtration apparatus and method thereof" was invented by Chih-Ming Tsao (Miaoli County, Taiwan) and Kuo-Cheng Huang (Miaoli County, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system includes a semiconductor apparatus configured to process a workpiece, a mist generator configured to generate a mist and a particle separator configured to receive an exhaust gas generated by the semiconductor apparatus. The particle separator includes a first fan, wherein the first fan includes a plurality of blades. Each of the plu...