US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on July 22 for "Reflector and/or method for ultraviolet curing of semiconductor" (Taiwanese Inventors)

ALEXANDRIA, Va., July 23 -- United States Patent no. 12,368,062, issued on July 22, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Reflector and/or method for ultraviolet curing of semiconductor" was invented by Chien-Chun Hu (Taichung, Taiwan), Chyi-Tsong Ni (Hsinchu, Taiwan) and Kuang-Wei Cheng (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An ultraviolet (UV) lamp assembly of a UV curing tool is provided for curing a low dielectric constant (low-k) material layer of a semiconductor wafer. The UV lamp assembly includes: a UV lamp which emits UV light; a first reflector arranged proximate to a first side of the UV lamp, the first reflector including a fi...