US Patent Issued to Taiwan Semiconductor Manufacturing on July 22 for "In-situ closed-loop management of radio frequency power generator" (Taiwanese Inventors)

ALEXANDRIA, Va., July 23 -- United States Patent no. 12,368,023, issued on July 22, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"In-situ closed-loop management of radio frequency power generator" was invented by Wei Ting Liu (Hsinchu, Taiwan) and Wen-Wei Fan (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure is directed to an in situ closed-loop radio frequency (RF) power management on RF processes such as a plasma etch process, a plasma chemical vapor deposition process, a plasma physical vapor deposition process, a plasma clean process, or the like. An RF power measurement device according to one or more embodiments of the present discl...