US Patent Issued to Taiwan Semiconductor Manufacturing on July 15 for "Interface tool and methods of operation" (Taiwanese Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,198, issued on July 15, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Interface tool and methods of operation" was invented by Yu-Syuan Cai (Hsinchu, Taiwan), Chen-Yuan Kao (Zhudong Township, Taiwan), Chia-Han Lai (Zhubei, Taiwan), Hong-Ming Wu (Taichung, Taiwan), Yu-Chan Tsai (New Taipei, Taiwan), Chun-Hsien Huang (Hsinchu, Taiwan) and Ken-Yu Chang (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Some implementations described herein provide a gas curtain system. The gas curtain system includes various components to prevent a gas flowing within a chamber of an interface tool from flowing through an o...