US Patent Issued to Taiwan Semiconductor Manufacturing on July 15 for "In-line device electrical property estimating method and test structure of the same" (Taiwanese Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,360,153, issued on July 15, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsin-Chu, Taiwan).

"In-line device electrical property estimating method and test structure of the same" was invented by Chen-Han Wang (Hsinchu, Taiwan) and Chun-Hsiung Lin (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for estimating at least one electrical property of a semiconductor device is provided. The method includes forming the semiconductor device and at least one testing unit on a substrate, irradiating the testing unit with at least one electron beam, estimating electrons from the testing unit induced by the electron beam, and e...