US Patent Issued to Taiwan Semiconductor Manufacturing on July 1 for "Optical assembly with coating and methods of use" (Taiwanese Inventors)

ALEXANDRIA, Va., July 3 -- United States Patent no. 12,346,020, issued on July 1, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Optical assembly with coating and methods of use" was invented by Pei-Cheng Hsu (Hsinchu, Taiwan), Ping-Hsun Lin (Hsinchu, Taiwan), Ta-Cheng Lien (Hsinchu, Taiwan) and Hsin-Chang Lee (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Coated nanotubes and bundles of nanotubes are formed into membranes useful in optical assemblies in EUV photolithography systems. These optical assemblies are useful in methods for patterning materials on a semiconductor substrate. Such methods involve generating, in a UV lithography system, UV radiation. T...