US Patent Issued to Taiwan Semiconductor Manufacturing on July 1 for "Multi-functional shutter disk for thin film deposition chamber" (Taiwanese Inventors)

ALEXANDRIA, Va., July 3 -- United States Patent no. 12,344,929, issued on July 1, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Multi-functional shutter disk for thin film deposition chamber" was invented by Wen-Hao Cheng (Taichung, Taiwan), Yen-Yu Chen (Taichung, Taiwan) and Yi-Ming Dai (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a multifunction chamber having a multifunctional shutter disk. The shutter disk includes a lamp device, a DC/RF power device, and a gas line on one surface of the shutter disk. With this configuration, simplifying the chamber type is possible as the various specific, dedicated chambers such as a d...