US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on Jan. 20 for "Robot magazine and tray load and unload system" (Taiwanese Inventors)

ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,528,198, issued on Jan. 20, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Robot magazine and tray load and unload system" was invented by Cheng-Lung Wu (Miaoli County, Taiwan), Chih-Hung Huang (Hsinchu County, Taiwan), Yang-Ann Chu (Hsinchu, Taiwan) and Jiun-Rong Pai (Hsinchu County, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer magazine is disposed on a load port of an oven chamber. The wafer magazine contains one or more wafer boats with semiconductor wafers. The wafer boats are supported in the wafer magazine by wall slots of the wafer magazine. Using a push bar, the wafer boats are transferred ou...