ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,521,775, issued on Jan. 13, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).
"Semiconductor device manufacturing system and method for manufacturing semiconductor device" was invented by Wei-Chun Hsu (Hsinchu, Taiwan), Yung-Li Tsai (Miaoli County, Taiwan), Sheng-Wei Wu (Hsinchu County, Taiwan), Chih-Hao Chao (Hsinchu, Taiwan) and Yu-Hao Huang (Hsinchu, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor device manufacturing system and a method for manufacturing semiconductor device are provided. The semiconductor device manufacturing system includes a substrate processing device and a processor. The su...