US Patent Issued to Taiwan Semiconductor Manufacturing on Feb. 4 for "Shutter disc for a semiconductor processing tool" (Taiwanese Inventors)

ALEXANDRIA, Va., Feb. 5 -- United States Patent no. 12,215,414, issued on Feb. 4, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Shutter disc for a semiconductor processing tool" was invented by Yi-Lin Wang (Kaohsiung, Taiwan), Chin-Szu Lee (Taoyuan, Taiwan), Hua-Sheng Chiu (Zhudong Town, Taiwan), Yi-Chao Chang (Hsinchu, Taiwan) and Zih-Shou Mue (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Some implementations described herein provide a shutter disc for use during a conditioning process within a processing chamber of a deposition tool. The shutter disc described herein includes a material having a wave-shaped section to reduce heat transfer to the shutter d...