US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on Feb. 4 for "Shower head structure and plasma processing apparatus using the same" (Taiwanese Inventors)

ALEXANDRIA, Va., Feb. 5 -- United States Patent no. 12,215,422, issued on Feb. 4, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Shower head structure and plasma processing apparatus using the same" was invented by Huan-Chieh Chen (Taichung, Taiwan), Jhih-Ren Lin (New Taipei, Taiwan), Tai-Pin Liu (Hsinchu County, Taiwan), Shyue-Shin Tsai (Tainan, Taiwan) and Keith Kuang-Kuo Koai (Hsinchu County, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A shower head structure and a plasma processing apparatus are provided. The shower head structure includes a plate body with a first zone and a second zone on a first surface. A plurality of first through holes are in the first...