US Patent Issued to Taiwan Semiconductor Manufacturing on Feb. 4 for "Semiconductor apparatus and method of collecting residues" (Taiwanese Inventors)

ALEXANDRIA, Va., Feb. 5 -- United States Patent no. 12,217,989, issued on Feb. 4, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Semiconductor apparatus and method of collecting residues" was invented by Ping-Cheng Lin (Hsinchu, Taiwan), Pin-Yi Hsin (Hsinchu County, Taiwan), Ching Shun Lee (New Taipei, Taiwan), Bo-Han Huang (Hsinchu, Taiwan) and Cheng-tsung Tu (MiaoLi County, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor apparatus and a method for collecting residues of curable material are provided. The semiconductor apparatus includes a chamber containing a wafer cassette, and a collecting module disposed in the chamber for collecting residues of cur...