ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,541,054, issued on Feb. 3, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).
"Photonic device and method of fabricating same" was invented by Shih-Yu Liao (Hsinchu, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A photonic device structure and method of fabricating the same. The structure includes a substrate that has a topside oxide layer and a silicon layer that is formed on the topside oxide layer. The structure further includes a rib waveguide component formed in the silicon layer and that includes contact holes. The contact holes include a contact hole depth, and a contact hole trench that is formed in the sil...