US Patent Issued to Taiwan Semiconductor Manufacturing on Feb. 25 for "Machine learning on overlay management" (Taiwanese Inventors)

ALEXANDRIA, Va., Feb. 26 -- United States Patent no. 12,237,188, issued on Feb. 25, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Machine learning on overlay management" was invented by Tzu-Cheng Lin (Hsinchu, Taiwan), Y. Y. Peng (Hsinchu, Taiwan), Jerry Wang (Hsinchu, Taiwan), Kewei Zuo (Hsinchu, Taiwan) and Chien Rhone Wang (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The current disclosure describes techniques for managing vertical alignment or overlay in semiconductor manufacturing using machine learning. Alignments of interconnection features in a fan-out WLP process are evaluated and managed through the disclosed techniques. Big data and neural netwo...