US Patent Issued to Taiwan Semiconductor Manufacturing on Feb. 18 for "Fabrication process control in optical devices" (American, Taiwanese Inventors)

ALEXANDRIA, Va., Feb. 19 -- United States Patent no. 12,228,768, issued on Feb. 18, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Fabrication process control in optical devices" was invented by Weiwei Song (San Jose, Calif.), Chan-Hong Chern (Palo Alto, Calif.), Chih-Chang Lin (San Jose, Calif.), Stefan Rusu (Sunnyvale, Calif.) and Min-Hsiang Hsu (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods of fabricating optical devices with high refractive index materials are disclosed. The method includes forming a first oxide layer on a substrate and forming a patterned template layer with first and second trenches on the first oxide layer. A material of the pa...