US Patent Issued to Taiwan Semiconductor Manufacturing on Dec. 30 for "Semiconductor processing tool and methods of operation" (Taiwanese Inventors)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,513,809, issued on Dec. 30, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Semiconductor processing tool and methods of operation" was invented by Kuan-Hung Chen (Taoyuan, Taiwan), Shang-Chieh Chien (New Taipei, Taiwan), Li-Jui Chen (Hsinchu, Taiwan) and Heng-Hsin Liu (New Taipei, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Some implementations described herein provide a dual-feedback control system for laser beam targeting in a lithography system such as an EUV lithography system. In addition to using feedback from a high-frequency quad-cell sensor to adjust a target position of the pre-pulse laser beam based ...