ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,509,773, issued on Dec. 30, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).
"Semiconductor processing tool" was invented by Yung-Tsun Liu (Taipei, Taiwan), Kuang-Wei Cheng (Hsinchu, Taiwan), Sheng-chun Yang (Tainan, Taiwan), Chih-Tsung Lee (Hsinchu, Taiwan) and Chyi-Tsong Ni (Hsinchu, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A chuck vacuum line of a semiconductor processing tool includes a first portion that penetrates a sidewall of a main pumping line of the semiconductor processing tool. The chuck vacuum line includes a second portion that is substantially parallel to the sidewall of the main pumping line an...