US Patent Issued to Taiwan Semiconductor Manufacturing on Dec. 23 for "Semiconductor processing tool and methods of operation" (Taiwanese Inventors)

ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,503,769, issued on Dec. 23, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Semiconductor processing tool and methods of operation" was invented by Che Wei Yang (New Taipei, Taiwan), Chih Cheng Shih (Kaohsiung, Taiwan), Kuo Liang Lu (Hsinchu, Taiwan), Yu Jiang (Taipei, Taiwan), Sheng-Chan Li (Tainan, Taiwan), Kuo-Ming Wu (Zhubei, Taiwan), Sheng-Chau Chen (Tainan, Taiwan), Chung-Yi Yu (Hsin-Chu, Taiwan) and Cheng-Yuan Tsai (Chu-Pei, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Some implementations described herein include systems and techniques for fabricating a wafer-on-wafer product using a filled lateral gap be...