US Patent Issued to Taiwan Semiconductor Manufacturing on Dec. 2 for "Semiconductor processing tool and methods of operation" (Taiwanese Inventors)

ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,487,534, issued on Dec. 2, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Semiconductor processing tool and methods of operation" was invented by Shih-Yu Tu (Zhubei, Taiwan), Chieh Hsieh (Taoyuan, Taiwan), Shang-Chieh Chien (New Taipei, Taiwan), Sheng-Kang Yu (Hsinchu, Taiwan), Li-Jui Chen (Hsinchu, Taiwan) and Heng-Hsin Liu (New Taipei, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A coating is included on one or more components of a lithography system. The coating reduces surface roughness of the one or more surfaces, increases flatness of the one or more surfaces, and/or increases uniformity of the one or more ...