US Patent Issued to Taiwan Semiconductor Manufacturing on Aug. 26 for "Pellicle, pellicle removal tool, and method of utilizing pellicle and pellicle removal tool" (Taiwanese Inventors)

ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,399,439, issued on Aug. 26, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Pellicle, pellicle removal tool, and method of utilizing pellicle and pellicle removal tool" was invented by Hsuan Jung Chang (Hsinchu, Taiwan), Kun-Lung Hsieh (Hsinchu, Taiwan), Ting-Hsien Ko (Hsinchu, Taiwan) and Chih-Wei Wen (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A dis-pellicle tool or pellicle removal tool that includes one or more clamp structures that each include a respective group of pins. The respective pins of the groups of pins of the one or more clamp structures are configured to, in operation, be inserted into...