US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on Aug. 26 for "Methods and systems for improving plasma ignition stability" (Taiwanese Inventors)

ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,400,864, issued on Aug. 26, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Methods and systems for improving plasma ignition stability" was invented by Ping-Hsun Lin (New Taipei, Taiwan), Hung-Yi Tsai (Zhubei, Taiwan), Hao-Ping Cheng (Taichung, Taiwan), Ta-Cheng Lien (Cyonglin, Taiwan) and Hsin-Chang Lee (Zhubei, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods for plasma stability in a plasma treatment tool are disclosed. A laser is positioned within a plasma treatment chamber within a skin depth of the electromagnetic field generated therein. The laser can be synchronized with the electrical triggering...