ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,394,647, issued on Aug. 19, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).
"Wafer shift detection" was invented by Ming-Sze Chen (Hsinchu, Taiwan), Yuan-Hsin Chi (Taichung, Taiwan), Hung-Chih Wang (Taichung, Taiwan) and Sheng-Yuan Lin (Hsinchu, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer storage elevator and method for detecting wafer position shift. The elevator includes a first storage elevator sidewall, a second storage elevator sidewall, and a storage seat positioned between the first and second storage elevator sidewalls. A first mirror block is coupled to a front side of the storage seat having...