US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on Aug. 19 for "Semiconductor apparatus and method of operating the same" (Taiwanese Inventors)

ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,393,114, issued on Aug. 19, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Semiconductor apparatus and method of operating the same" was invented by Wen Lo (Taipei, Taiwan), Shih-Ming Chang (Hsinchu County, Taiwan) and Chun-Hung Liu (Kaohsiung, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes generating an electron beam from a radiation source; modifying an energy distribution of the electron beam through a first shaping aperture; and exposing a substrate to portions of the electron beam passing through the first shaping aperture. The first shaping aperture comprises blocking strips with a plur...